A MEMS Accelerometer that Utilizes Both Series and Differential Modes

Yuancheng Ouyang; Miao He

doi:10.6919/ICJE.202510_11(10).0009

Authors

Yuancheng Ouyang
Miao He

DOI:

https://doi.org/10.6919/ICJE.202510_11(10).0009

Keywords:

MEMS Accelerometer; COMSOL; Quadruple Output.

Abstract

This paper presents an in-depth simulation analysis and optimized design of a MEMS accelerometer with a quadruple-cantilever structure, conducted using COMSOL Multiphysics. The simulation results reveal a fundamental mechanical characteristic: under acceleration load, the cantilever beam exhibits a strain distribution that is symmetric in magnitude but opposite in sign across its central axis (one side is under tensile strain while the other is under compressive strain). Leveraging this key insight, this study proposes an innovative series-parallel hybrid connection strategy. The four sensing elements on the two cantilevers are grouped according to their strain phases, enabling elements with identical strain to be connected in series for signal summation. The resultant anti-phase signals are then processed by a differential amplification circuit. This design successfully achieves two core advantages: firstly, through effective signal superposition and differential amplification, the final output signal amplitude is quadrupled compared to that of conventional single-ended accelerometers, significantly enhancing sensitivity. Secondly, the inherent common-mode rejection capability of the differential detection mechanism effectively suppresses environmental noise interference. This work provides a novel and effective solution for the design of high-sensitivity and high-robustness MEMS accelerometers.

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