XIAO, Jingwei; ZHANG, Zhenjian; DING, Guojian; JIA, Haiqiang; HE, Miao; WANG, Yang. Application of Ion Beam Etching in the Micro-LED Process. International Core Journal of Engineering, [S. l.], v. 11, n. 10, p. 1–6, 2025. DOI: 10.6919/ICJE.202510_11(10).0001. Disponível em: https://icj-e.org/index.php/ojs/article/view/122. Acesso em: 6 jul. 2026.